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CTI On-Board® IS 320FX 低温泵
The On Board IS 320FX cryogenic pump, developed specifically to address the challenges of today's ion implantation processes, can improve hydrogen ext
Product details
CTI On-Board ® Advantages of IS 320FX Low Temperature Pump Product:
1. Designed specifically for ion implantation applications
2. Optimized the tool processing capability
3. Intelligent 'self-regulation' technology
4. Lower cost of ownership
5. Increase normal operating time
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